abstract
α-alumina-g-polyacrylamide (α-Al2O3-g-PAM) composite abrasive filaments prepared by surface graft polymerization. Composition, structure and morphology of the product were determined by Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, time-of-flight secondary ion mass spectroscopy and scanning electron microscopy, is in each case. Then, the chemical mechanical polishing performance of the composite abrasive body were studied on glass substrates. Atomic force microscopy images show that the average roughness of the polished glass substrate surface can be reduced from 0.74 nm for pure α-Al2O3 abrasive to 0.45 nm for α-Al2O3-g-PAM abrasive.
α-alumina-g-polyacrylamide (α-Al2O3-g-PAM) composite abrasive filaments prepared by surface graft polymerization. Composition, structure and morphology of the product were determined by Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, time-of-flight secondary ion mass spectroscopy and scanning electron microscopy, is in each case. Then, the chemical mechanical polishing performance of the composite abrasive body were studied on glass substrates. Atomic force microscopy images show that the average roughness of the polished glass substrate surface can be reduced from 0.74 nm for pure α-Al2O3 abrasive to 0.45 nm for α-Al2O3-g-PAM abrasive.
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